INVESTIGATION OF THE PLASMA CHARACTERISTICS BY VARYING THE PRESSURE AND GAS TEMPERATURE INSIDE THE PECVD CHAMBER (Record no. 84467)

000 -LEADER
fixed length control field 00433nam a22001457a 4500
003 - CONTROL NUMBER IDENTIFIER
control field OSt
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 620.5 KHA
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name KHANNA (SAGAR)
245 ## - TITLE STATEMENT
Title INVESTIGATION OF THE PLASMA CHARACTERISTICS BY VARYING THE PRESSURE AND GAS TEMPERATURE INSIDE THE PECVD CHAMBER
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication, distribution, etc DELHI TECHNOLOGICAL UNIVERSITY
Date of publication, distribution, etc 2018
300 ## - PHYSICAL DESCRIPTION
Extent/Pages 45
502 ## - DISSERTATION NOTE
Degree type M.TECH
Year degree granted 2018
Miscellaneous information PROF. S.C.SHARMA
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element APPLIED PHYSICS
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Source of classification or shelving scheme
Koha item type Elec. Thesis & Dissertation
Holdings
Withdrawn status Lost status Source of classification or shelving scheme Damaged status Not for loan Permanent location Current location Date acquired Full call number Barcode Date last seen Bill Date Koha item type
          Delhi Technological University Delhi Technological University 2018-11-26 620.5 KHA TD-4291 2018-11-26 2018-11-26 Elec. Thesis & Dissertation