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|---|---|---|---|
| 008 | 160710s2003 xx 000 0 und d | ||
| 082 | _a548.84 ANA | ||
| 100 | _aANANTHASURESH,G.K.ED. | ||
| 245 | _aOPTIMAL SYNTHESIS METHODS FOR MEMS | ||
| 260 |
_aBOSTON, LONDON _bKLUWER ACADEMIC PUBLISHERS _c2003 |
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| 300 | _a320 | ||
| 942 |
_2ddc _cB |
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| 999 |
_c64679 _d64679 |
||