| 000 | 00433nam a22001457a 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 082 | _a620.5 KHA | ||
| 100 | _aKHANNA (SAGAR) | ||
| 245 | _aINVESTIGATION OF THE PLASMA CHARACTERISTICS BY VARYING THE PRESSURE AND GAS TEMPERATURE INSIDE THE PECVD CHAMBER | ||
| 260 |
_aDELHI TECHNOLOGICAL UNIVERSITY _c2018 |
||
| 300 | _a45 | ||
| 502 |
_bM.TECH _d2018 _gPROF. S.C.SHARMA |
||
| 650 | _aAPPLIED PHYSICS | ||
| 942 |
_2ddc _cTD |
||
| 999 |
_c84467 _d84467 |
||